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AMAT 200mm Centura-II EMAX 3CH System

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Writer SEMITECH Date23-07-21 09:46 View1,943
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AMAT Centura-II EMAX 3 CH System

POS A, B, C: EMAX Chamber (STP1603 Turbo Pump)

POS F: Orientor CH

WBLL, VHP Robot Assy, OEM28B-02, EPD Controller with HOT PACK

 

Exculde items: Process KIT, ESC, MFC

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