Foundry - Etc
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Writer SEMITECH 작성일15-09-03 17:03 View 13,386본문
●Wet Station
■ Wet
Bath & Spin Dryer
■ Dry
Oven
•
Range Amb.
+10 to 250℃
•
Heating Time to 100℃ ->
9min
•
Recovery time at 100℃
->
2min
● Inspection & Measurement
■ RS
Measurement
■ Sheet Resistance
● Microscope
■ Particle Check & Inspection
■ CD
Measurement
■ SEM
●Inspection & Measurement
■ 3D Profiler
■ Defect & Depth Profile
● 협력사
보유
• Dicing SAW : Si
/ Glass
•
Inspection System : OVP
Tester / Final Inspection System
