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Foundry - Etch

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Writer SEMITECH 작성일15-09-03 16:50 View 13,023

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● Dry Etch

 

■ICP-Etch

 

Full Automation

 

7 Slot Cassette

 

Wafer Size 2”~12”

 

High Capacity for GaN & Sapphire Etching

 

 

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협력사 보유

 

Dry Etcher : Nitride, Oxide, Poly-Si, Metal Etching

 

Deep Reactive Dry Etcher : Vertical Silicon Etch (~600um)

 

Wet Etching System : Silicon Bulk Etching/KOH Based Etching

 


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