Foundry - Photolithography(150mm/6")
페이지 정보
Writer SEMITECH 작성일15-09-03 16:46 View 13,182본문
● Photolithography(150mm/6”)
■ Photo
Stepper-1
• Single
Side Alignment
•
Full Automation
•
G-Line / I-Line
•
Resolution (0.5㎛)
■ PR
Track
• HMDS
Coating
•
PR Coating & Develop
•
Soft & Hard Bake
•
Positive & Negative Type
