Foundry - Diffusion
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Writer SEMITECH 작성일15-08-28 15:10 View 13,330본문
■ Anneal(150MM/6")
◆ RTA(AST-2800)
- Process Temp Range 400 ~ 1,200 ℃
- Annealing & Thermal Oxidation
- Cassette TYPE
◆ Furnaces : Thermal Oxidation/Impurity Diffusion/Annealing/Metal Alloying
