Foundry - Etch
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Writer SEMITECH 작성일15-09-03 16:50 View 11,977본문
● Dry
Etch
■ICP-Etch
• Full
Automation
•
7 Slot Cassette
•
Wafer Size 2”~12”
•
High Capacity for GaN
& Sapphire Etching
● 협력사 보유
• Dry Etcher : Nitride,
Oxide, Poly-Si, Metal Etching
•
Deep Reactive Dry Etcher : Vertical
Silicon Etch (~600um)
• Wet Etching System : Silicon
Bulk Etching/KOH Based Etching
